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Film thickness middle-bar


Outline: Ellipsometer is optical instruments which measure the change in polarization
state of light beam upon reflection from a sample surface to analyze
the film thickness, the optical constants as the refractive index / absorption,
or the optical constants of bulk materials.

MARY-102 was developed based on the integrated technology with
the mottos : Compact size, lower price, higher accuracy and user friendly
software.


ＭＡＣＯ

　

 
Ultra-compact Ellipsometer
 
MACO-101
　　　

 

（comparison our product　compact ellipsometer　MARY-102）

MACOtyou.jpg - 19,844BYTES

 

＝Characteristic＝


● Microminiature & light weight

　 Ihavedesignedsmall and lightas much as possible.

  Youcan reduce theinstallation space.

 

● High Accuracy

  By the Rotating Retarder (Quarter Wave Plate) method,region which is   

  difficult to be measured by Rotating Analyzer method can bemesured.　

 

●　Tilt adjustment


　Equipped with an auto-collimator at the top.　　

 

● User Friendly Software
　

　The software for MARY-102 can be selected from two versions to meet  

  requests in each application.

  1)"Industrial Version" provides smart functions to measure sample with

  easy operation.
 

  2)"Research Version" provides excellent functions to measure and analyze

  with simulation.

 


Ellipsometer Specifications :

Method Rotating Retarder Method
Light Source

LD (Wavelength upon request)

0.8 mW HeNeLaser (λ@632.8nm)

Beam Diameter 0.8mm Φ(λ@632.8nm)
Incident Angle 70 degree Fixed
Sample Stage 2" standard
Manual Z-axis Manual tilt control
Accuracy Δ=±0.03 degree
Ψ=±0.03 degree
@SiO2(1000Å)/Si (635nm LD)
Sampling Time 0.05 sec minimum
Software Select from "Research" or "Industrial"
PC IBM-PC compatible
Dimensions 220(W) x 125(D) x 115(H)mm 3kg
Electric Supply  AC100V(±10）　4A（MAX).

Ellipsometer MARY-102